The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Dec. 21, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Yikai Chen, Santa Clara, CA (US);
Biraja Prasad Kanungo, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A ceramic coating is coated on a body of an article, wherein the ceramic coating includes YO, YAlO, YAlO, or a solid-solution of YOmixed with at least one of ZrO, AlO, HfO, ErO, NdO, NbO, CeO, SmOor YbO. The ceramic coating is applied to the body by a method including providing a plasma spraying system having a plasma current in the range of between about 100 A to about 1000 A, positioning a torch standoff of the plasma spraying system a distance from the body between about 60 mm and about 250 mm, flowing a first gas through the plasma spraying system at a rate of between about 30 L/min and about 400 L/min, and plasma spray coating the body to form a ceramic coating, wherein splats of the coating are amorphous and have a pancake shape.