The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Feb. 24, 2017
Qorvo Us, Inc., Greensboro, NC (US);
Paul Stokes, Orlando, FL (US);
Vishwavasu Potdar, Plano, TX (US);
Qorvo US, Inc., Greensboro, NC (US);
Abstract
A bulk acoustic wave (BAW) device includes a substrate, a reflector on the substrate, a piezoelectric layer on the reflector and including a first opening through which a portion of the reflector is exposed, an electrode layer on the portion of the reflector exposed through the first opening, a passivation layer on the piezoelectric layer and a portion of the electrode layer and including a second opening through which a portion of the electrode layer is exposed, an under-bump metallization layer on the portion of the electrode layer exposed through the second opening and extending over the second opening and the first opening on the passivation layer, and a copper pillar structure on the under-bump metallization layer such that the entirety of the under-bump metallization layer is covered by the copper pillar structure.