The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Jan. 04, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Cheng-Wei Cheng, White Plains, NY (US);

Effendi Leobandung, Stormville, NY (US);

Ning Li, White Plains, NY (US);

Devendra K. Sadana, Pleasantville, NY (US);

Kuen-Ting Shiu, Yorktown Heights, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 33/10 (2010.01); H01S 5/183 (2006.01); H01L 33/12 (2010.01); H01L 33/30 (2010.01); H01L 31/0304 (2006.01); H01L 31/0232 (2014.01); H01L 31/105 (2006.01); H01L 33/00 (2010.01); H01S 5/343 (2006.01); H01S 5/187 (2006.01); H01L 31/18 (2006.01); H01S 5/02 (2006.01); H01L 33/02 (2010.01); H01S 5/026 (2006.01);
U.S. Cl.
CPC ...
H01S 5/18377 (2013.01); H01L 31/02327 (2013.01); H01L 31/0304 (2013.01); H01L 31/105 (2013.01); H01L 31/1852 (2013.01); H01L 33/0012 (2013.01); H01L 33/0066 (2013.01); H01L 33/025 (2013.01); H01L 33/105 (2013.01); H01L 33/12 (2013.01); H01L 33/30 (2013.01); H01S 5/021 (2013.01); H01S 5/0218 (2013.01); H01S 5/187 (2013.01); H01S 5/18361 (2013.01); H01S 5/3432 (2013.01); H01S 5/34366 (2013.01); H01S 5/0262 (2013.01);
Abstract

A structure includes an optoelectronic device having a Group IV substrate (e.g., Si); a buffer layer (e.g. SiGe) disposed on the substrate and a first distributed Bragg reflector (DBR) disposed on the buffer layer. The first DBR contains alternating layers of doped Group IV materials (e.g., alternating layers of SiGe, where 0.8<y<1, and SiGe, where 0.2<z<0.4) that are substantially transparent to a wavelength of interest. The structure further includes a strained layer of a Group III-V material over the first DBR and a second DBR over the strained layer. The second DBR contains alternating layers of electrically conductive oxides (e.g., ITO/AZO) that are substantially transparent to the wavelength of interest. Embodiments of VCSELs and photodetectors can be derived from the structure. The strained layer of Group III-V material can be, for example, a thin layer of InGaAs having a thickness in a range of about 2 nm to about 5 nm.


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