The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Nov. 22, 2016
Seiko Epson Corporation, Tokyo, JP;
Koji Sumi, Shiojiri, JP;
Eiji Osawa, Suwa, JP;
Seiko Epson Corporation, , JP;
Abstract
A vibrating plate is provided between a substrate and a piezoelectric element formed of electrodes and a piezoelectric layer and includes a first layer which is formed of a silicon oxide and a second layer which is formed of a ceramic having a Young's modulus larger than that of the silicon oxide. Under the condition in which the following expression (1) has a constant value, where in the expression (1), E, d, E, and drepresent Young's modulus of the first layer, the thickness thereof, Young's modulus of the second layer, and the thickness thereof,  (1)when the combination of dand dwhich sets the value of the following expression (2) in a range of from the minimum value to +2% thereof is represented by (D, D),  (2)the thickness of the first layer and the thickness of the second layer are represented by Dand D.