The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Oct. 15, 2018
Applicant:
National Chung Hsing University, Taichung, TW;
Inventors:
Yu-Chen Liou, Taichung, TW;
Fu-Hsing Lu, Taichung, TW;
Assignee:
NATIONAL CHUNG HSING UNIVERSITY, Taichung, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01L 31/0216 (2014.01); H01L 31/024 (2014.01); H01L 31/0392 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 16/30 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02168 (2013.01); C23C 14/0641 (2013.01); C23C 14/0676 (2013.01); C23C 14/0688 (2013.01); C23C 14/083 (2013.01); H01L 31/024 (2013.01); H01L 31/0392 (2013.01); C23C 16/308 (2013.01);
Abstract
A solar energy absorbing device includes a substrate and a solar selective absorber film. The solar selective absorber film has a bottom surface attached on the substrate, and a top surface opposite to the bottom surface. The solar selective absorber film is a TiNObased film, and x and y vary from 1 to 0.1 and 0.2 to 2, respectively, from the bottom surface to the top surface of the solar selective absorber film.