The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Jan. 03, 2018
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventor:
Thomas Fischer, Regensburg, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/78 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); B28D 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); B28D 5/0052 (2013.01); H01L 21/67092 (2013.01); H01L 21/67132 (2013.01); H01L 21/6836 (2013.01); H01L 21/68721 (2013.01); H01L 21/68778 (2013.01); H01L 21/68785 (2013.01); H01L 21/78 (2013.01); H01L 2221/68327 (2013.01);
Abstract
An apparatus which comprises an expansion unit configured for expanding a foil, and a mounting unit configured for subsequently mounting the expanded foil on a frame and a workpiece, in particular a wafer, on the expanded foil.