The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Jun. 15, 2017
Applicant:
Stratio, Inc., San Jose, CA (US);
Inventors:
Woo-Shik Jung, San Jose, CA (US);
Yeul Na, East Palo Alto, CA (US);
Youngsik Kim, Palo Alto, CA (US);
Jae Hyung Lee, Palo Alto, CA (US);
Jin Hyung Lee, Palo Alto, CA (US);
Assignee:
Stratio, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/302 (2006.01); H01L 21/324 (2006.01); H01L 21/265 (2006.01); H01L 21/311 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02236 (2013.01); H01L 21/02255 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 21/02664 (2013.01); H01L 21/26513 (2013.01); H01L 21/302 (2013.01); H01L 21/31111 (2013.01); H01L 21/3247 (2013.01); H01L 21/30604 (2013.01);
Abstract
Methods for reducing surface roughness of germanium are described herein. In some embodiments, the surface roughness is reduced by thermal oxidation of germanium. In some embodiments, the surface roughness is further reduced by controlling a rate of the thermal oxidation. In some embodiments, the surface roughness is reduced by thermal annealing.