The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Jan. 29, 2018
Applicant:

Howard Hughes Medical Institute, Ashburn, VA (US);

Inventors:

C. Shan Xu, Ashburn, VA (US);

Kenneth J. Hayworth, Ashburn, VA (US);

Harald F. Hess, Ashburn, VA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/31 (2006.01); H01J 37/30 (2006.01); G01N 23/2251 (2018.01); H01J 37/244 (2006.01); H01J 37/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G01N 23/2251 (2013.01); H01J 37/023 (2013.01); H01J 37/244 (2013.01); H01J 37/3005 (2013.01); H01J 37/3007 (2013.01); H01J 37/31 (2013.01); H01J 2237/022 (2013.01); H01J 2237/024 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/2067 (2013.01); H01J 2237/3151 (2013.01); H01J 2237/31745 (2013.01);
Abstract

A microscopy system for imaging a sample can include a scanning electron microscope system configured for imaging a surface layer of the sample and a focused ion beam system configured for generating an ion beam for milling the surface layer away from a sample after it has been imaged. A movable mechanical shutter can be configured to be moved automatically into a position between the sample and the scanning electron microscope system, so that when the electron beam is not imaging the sample the movable mechanical shutter is positioned between the sample and the scanning electron microscope system.


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