The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Mar. 14, 2019
Nissin Ion Equipment Co., Ltd., Koka, Shiga, JP;
Masakazu Adachi, Koka-city, JP;
Shigeki Sakai, Koka-city, JP;
Yuya Hirai, Koka-city, JP;
Takayuki Murayama, Koka-city, JP;
Tomoya Taniguchi, Koka-city, JP;
Weijiang Zhao, Koka-city, JP;
NISSIN ION EQUIPMENT CO., LTD., Koka, Shiga, JP;
Abstract
An ion source is provided. The ion source includes a plasma generation chamber, a plate member, and an extraction electrode. The plasma generation chamber is supplied with a halogen-containing material. The plate member is provided on an end of the plasma generation chamber located on a side toward which an ion beam is extracted. The extraction electrode is disposed downstream of the plate member. The plate member is formed with a gas supply passage via which hydrogen gas is supplied to the extraction electrode.