The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Jan. 29, 2018
Applicant:
Agc Inc., Chiyoda-ku, JP;
Inventor:
Yuzo Okamura, Tokyo, JP;
Assignee:
AGC Inc., Chiyoda-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/60 (2012.01); B32B 17/06 (2006.01); G03F 1/22 (2012.01); G03F 1/54 (2012.01); G03F 1/24 (2012.01); G03F 1/52 (2012.01);
U.S. Cl.
CPC ...
G03F 1/60 (2013.01); B32B 17/06 (2013.01); G03F 1/22 (2013.01); G03F 1/24 (2013.01); G03F 1/52 (2013.01); G03F 1/54 (2013.01); B32B 2307/71 (2013.01);
Abstract
A glass substrate for a mask blank includes a first surface and a second surface. The first surface and second surface face each other. Each of the first surface and the second surface is approximately square having a vertical length and a horizontal length being equal to the vertical length. The first surface of the glass substrate has specific profile properties.