The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Mar. 07, 2018
Applicant:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Inventors:
Tamio Ikehashi, Kanagawa, JP;
Hiroaki Yamazaki, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); G01N 27/22 (2006.01); G01N 25/20 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0022 (2013.01); G01N 25/20 (2013.01); G01N 27/221 (2013.01); G01N 27/227 (2013.01); G01N 33/005 (2013.01); G01N 2027/222 (2013.01);
Abstract
According to one embodiment, a gas sensor is disclosed. The gas sensor includes a substrate region, a first electrode provided on the substrate region, and a movable structure above the first electrode. The movable structure includes a deformable member which deforms by absorbing or adsorbing a predetermined gas, a heat member which heats the deformable member, and a second electrode. The gas sensor further includes a first cavity region which is provided between the first electrode and the second electrode.