Lighting device for inspection and inspection system

Abstract

Provided is an inspection lighting device with which, even when changes in light that occur at respective feature points on an object to be inspected are small, the amounts of those changes in light can be determined across the entire field-of-view range, and the feature points can be detected under exactly the same conditions. An inspection lighting deviceincludes a surface light sourceand a lensthat is disposed between the surface light sourceand an inspection object W, the lensbeing disposed nearer to the inspection object W such that at least one of a shielding mask Mand a filtering means Fis located centered around a focal distance position of the lens. An irradiation solid angle of light emitted from the surface light sourceand irradiated onto the inspection object W by the lensis configured to have solid angle regions as desired, the solid angle regions having specific optical attributes. The shapes, sizes, and inclination angles of irradiation solid angles of the inspection light as well as solid angle regions having specific optical attributes within the irradiation solid angles can be set to be substantially uniform across the entire field of view in accordance with changes that occur at feature points on the inspection object.