The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
May. 25, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
William T. Weaver, Austin, TX (US);
Robert Brent Vopat, Austin, TX (US);
Joseph Yudovsky, Campbell, CA (US);
Jason M. Schaller, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/455 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4585 (2013.01); C23C 16/4584 (2013.01); C23C 16/45551 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01);
Abstract
Apparatus and methods for aligning large susceptors in batch processing chambers are described. Apparatus and methods for controlling the parallelism of a susceptor relative to a gas distribution assembly are also described.