The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2020

Filed:

Mar. 22, 2017
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Tomohisa Azuma, Tokyo, JP;

Masaru Nanao, Tokyo, JP;

Tatsuji Sano, Tokyo, JP;

Masahito Furukawa, Tokyo, JP;

Kenta Ishii, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/193 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01); H01L 41/047 (2006.01); H01L 41/297 (2013.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
H01L 41/1873 (2013.01); C23C 14/088 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); H01J 37/3426 (2013.01); H01L 41/0471 (2013.01); H01L 41/297 (2013.01); H01L 41/316 (2013.01);
Abstract

A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABOas a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least one selected from the group consisting of Nb (niobium), Ta (tantalum) and Zr (zirconium) with Nb (niobium) as a necessity, the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains and grain boundaries existing among the crystal grains, and in the grain boundary, the molar ratio of at least one of Nb (niobium), Ta (tantalum), and Zr (zirconium) in the B components is higher than the molar ratio in the interior of the crystal grains by 30% or more.


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