The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2020

Filed:

Nov. 18, 2016
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Takao Mouri, Nagaokakyo, JP;

Kansho Yamamoto, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/09 (2006.01); H01L 41/04 (2006.01); H01L 41/113 (2006.01); H01L 41/18 (2006.01); H04R 17/00 (2006.01); H04R 17/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0471 (2013.01); H01L 41/04 (2013.01); H01L 41/09 (2013.01); H01L 41/0973 (2013.01); H01L 41/113 (2013.01); H01L 41/1138 (2013.01); H01L 41/18 (2013.01); H04R 17/00 (2013.01); H04R 17/02 (2013.01);
Abstract

A piezoelectric device that includes a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a lower electrode arranged below the piezoelectric layer in at least the membrane part; and an upper electrode that is arranged above the piezoelectric layer so as to face at least part of the lower electrode with the piezoelectric layer interposed therebetween in the membrane part. A heater is arranged above the piezoelectric layer so as to be separate from the upper electrode or at least part of the upper electrode doubles as a heater.


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