The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2020

Filed:

Jun. 21, 2016
Applicant:

Aurora Labs Limited, Applecross, Western Australia, AU;

Inventor:

David Budge, Applecross, AU;

Assignee:

Aurora Labs Limited, Bibra Lake, AU;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/301 (2006.01); H05H 1/54 (2006.01); H01J 37/305 (2006.01); H05H 1/24 (2006.01);
U.S. Cl.
CPC ...
H01J 37/301 (2013.01); H01J 37/305 (2013.01); H05H 1/2406 (2013.01); H05H 1/54 (2013.01); H01J 2237/3132 (2013.01); H05H 2001/2412 (2013.01);
Abstract

A charged particle propagation apparatus has a generator including a vacuum chamber with a gun therein for discharging a charged particle beam through a beam exit. A higher pressure region adjoins the vacuum chamber at the beam exit and is maintainable at a pressure greater than a pressure of the vacuum chamber. A plasma interface located at the beam exit includes a plasma channel having at least three electrode plates disposed between its first end and its second end. A control system is adapted to apply a sequence of electrical currents to the electrode plates, which cause at least one plasma to move from the first end to the second end of the plasma channel, thereby pumping down the beam exit, and, in use, the charged particle beam is propagated from the vacuum chamber through the, or each, plasma into the higher pressure region.


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