The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2020
Filed:
Feb. 08, 2018
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Naomi Fukumaki, Yokkaichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/455 (2006.01); H01J 37/32 (2006.01); C23C 16/44 (2006.01); G01F 7/00 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45502 (2013.01); C23C 16/4404 (2013.01); C23C 16/45561 (2013.01); G01F 7/005 (2013.01); G05D 7/0635 (2013.01); H01J 37/32449 (2013.01); H01L 21/67017 (2013.01); H01L 21/67253 (2013.01);
Abstract
In one embodiment, a semiconductor manufacturing apparatus includes first and second tanks configured to store a gas fed from a gas feeder. The apparatus further includes a chamber configured to process a wafer by using the gas fed from the gas feeder, the first tank or the second tank. The apparatus further includes a controller configured to control feeding of the gas to the first tank, the second tank and the chamber.