The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2020
Filed:
Sep. 07, 2017
The Government of the United States of America, As Represented BY the Secretary of the Navy, Arlington, VA (US);
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Francis J. Kub, Arnold, MD (US);
Karl D. Hobart, Alexandria, VA (US);
Eugene A. Imhoff, Washington, DC (US);
Rachael L. Myers-Ward, Spriingfield, VA (US);
Eugene Cook, Melrose, MA (US);
Jonathan Bernstein, Medfield, MA (US);
Marc Weinberg, Needham, MA (US);
Abstract
Electromechanical device structures are provided, as well as methods for forming them. The device structures incorporate at least a first and second substrate separated by an interface material layer, where the first substrate comprises an anchor material structure and at least one suspended material structure, optionally a spring material structure, and optionally an electrostatic sense electrode. The device structures may be formed by methods that include providing an interface material layer on one or both of the first and second substrates, bonding the interface materials to the opposing first or second substrate or to the other interface material layer, followed by forming the suspended material structure by etching.