The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
May. 22, 2019
Georges J. Gorin, Novato, CA (US);
Georges J. Gorin, Novato, CA (US);
Other;
Abstract
A method, apparatus and system for initiating a plasma with a low pressure inductively coupled RF plasma to dissociate one or more gases, the method including supplying one or more gases from a source to an inductively coupled plasma discharge chamber; applying RF power to the plasma discharge chamber by capacitive coupling to dissociate the one or more gases and create a plasma; preventing increased contamination from the capacitive electrodes by confining the plasma with at least one constriction acting as an improved power density device; and withdrawing the dissociated one or more gases from the plasma discharge chamber through at least one constriction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile