The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2020

Filed:

Feb. 07, 2018
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventor:

Takahiro Tomimatsu, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 27/11582 (2017.01); H01L 27/1157 (2017.01); H01L 27/11565 (2017.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01); G11C 16/04 (2006.01); H01L 23/522 (2006.01); G11C 16/06 (2006.01); H01L 27/11573 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); G11C 16/0483 (2013.01); H01L 21/76816 (2013.01); H01L 21/76877 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/562 (2013.01); H01L 27/1157 (2013.01); H01L 27/11565 (2013.01); G11C 16/06 (2013.01); H01L 27/11573 (2013.01);
Abstract

According to one embodiment, a multi-layer wiring structure includes a first multi-layer section, first contact plugs, and pillars. First conductors and first insulators are alternately layered in the first multi-layer section. The multi-layer section includes a first area that includes memory cells, and a second area different from the first area. The first contact plugs are formed in the first holes extending from an uppermost layer of the first multi-layer section respectively to the first conductors in the second area, side surfaces of the first contact plugs being covered with first insulating films. The pillars are formed of second insulators and passing through the first multi-layer section in a layered direction in the second area.


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