The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
May. 30, 2008
Applicant:
Peter Van Der Meulen, Newburyport, MA (US);
Inventor:
Peter van der Meulen, Newburyport, MA (US);
Assignee:
BROOKS AUTOMATION, INC., Chelmsford, MA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67751 (2013.01); H01L 21/67126 (2013.01); H01L 21/67353 (2013.01); H01L 21/67376 (2013.01);
Abstract
A two piece shell is employed for intermediate and long term storage of substrates. The shell is formed of two halves that can be juxtaposed in vacuum and externally vented, with the internal vacuum retaining the halves in vacuum-sealed engagement. One of the halves also provides a vacuum-sealing perimeter for selectively sealing to a process chamber during loading and/or unloading of the shell with a substrate. A vacuum monitor or the like may be employed to monitor pressure during storage and provide alerts if the vacuum within the sealed shell is compromised.