The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Oct. 26, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vladimir Knyazik, Palo Alto, CA (US);
Shahid Rauf, Pleasanton, CA (US);
Stephen Prouty, San Jose, CA (US);
Roland Smith, Sunnyvale, CA (US);
Denis M. Koosau, Pleasanton, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F28F 3/12 (2006.01); F28D 7/04 (2006.01); F28D 1/047 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); F28D 7/04 (2013.01); F28F 3/12 (2013.01); F28D 1/0472 (2013.01); F28F 2210/02 (2013.01);
Abstract
Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.