The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2020

Filed:

Dec. 05, 2014
Applicants:

Agc Glass Europe, S.a., Gosselies, BE;

Agc Flat Glass North America, Inc., Alpharetta, GA (US);

Asahi Glass Co., Ltd., Tokyo, JP;

Inventors:

Thomas Biquet, Gosselies, BE;

Peter Maschwitz, Sebastopol, CA (US);

John Chambers, San Francisco, CA (US);

Hughes Wiame, Gosselies, BE;

Assignees:

AGC GLASS EUROPE, Louvain-la Neuve, BE;

AGC FLAT GLASS NORTH AMERICA, INC., Alpharetta, GA (US);

ASAHI GLASS CO., LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/00 (2006.01); H01J 37/32 (2006.01); H05H 1/46 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); H05H 1/48 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32541 (2013.01); C23C 16/455 (2013.01); C23C 16/50 (2013.01); H01J 37/3244 (2013.01); H01J 37/32568 (2013.01); H01J 37/32596 (2013.01); H05H 1/46 (2013.01); H05H 1/48 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3325 (2013.01); H05H 2001/466 (2013.01); H05H 2240/10 (2013.01); H05H 2245/1235 (2013.01);
Abstract

The present invention relates to a hollow cathode plasma source and to methods for surface treating or coating using such a plasma source, comprising first and second electrodes (), each electrode comprising an elongated cavity (), wherein dimensions for at least one of the following parameters is selected so as to ensure high electron density and/or low amount of sputtering of plasma source cavity surfaces, those parameters being cavity cross section shape, cavity cross section area cavity distance (), and outlet nozzle width ().


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