The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Sep. 06, 2017
Toshiba Memory Corporation, Tokyo, JP;
Masato Naka, Kanagawa, JP;
Toshiba Memory Corporation, Tokyo, JP;
Abstract
A method for detecting coordinates includes detecting a first position in an inspection target placed on a placement surface of an inspection stage and a second position in the inspection target separated from the first position. A coordinate shift from the first position to the second position includes a first shift component in a first direction taken along the placement surface, and a second shift component in a second direction taken along the placement surface and crossing the first direction. The method further includes calculating a coordinate in the first direction of the second position using a first function, the first function including the first shift component and the second shift component as variables; and calculating a coordinate in the second direction of the second position using a second function, the second function including the first shift component and the second shift component as variables.