The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
May. 02, 2017
Nissan Chemical Corporation, Tokyo, JP;
NISSAN CHEMICAL CORPORATION, Tokyo, JP;
Abstract
There is provided a novel resist underlayer film forming composition comprising a polymer having a repeating structural unit of formula (1a) and/or (1b): [wherein two Rs are each independently a Calkyl group, a Calkenyl group, an aromatic hydrocarbon group, a halogen atom, a nitro group, or an amino group, two Rs are each independently a hydrogen atom, a Calkyl group, a Calkenyl group, an acetal group, an acyl group, or a glycidyl group, Ris an aromatic hydrocarbon group optionally having a substituent or a heterocyclic group, Ris a hydrogen atom, a phenyl group, or a naphthyl group, two ks are each independently 0 or 1, m is an integer of 3 to 500, p is an integer of 3 to 500, X is a benzene ring, and two —C(CH)— groups bonded to the benzene ring are in a meta position or a para position], and a solvent.