The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Feb. 17, 2015
Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;
Takashi Oshima, Tokyo, JP;
Yuki Furubayashi, Tokyo, JP;
HITACHI, LTD., Tokyo, JP;
Abstract
Provided is an acceleration sensor capable of realizing a simultaneous operation method of signal detection and servo control in place of a time-division processing method, by an MEMS process in which a manufacturing variation is large. The acceleration sensor is an MEMS capacitive acceleration sensor and has capacitive elements for signal detection and capacitive elements for servo control different from the capacitive elements for the signal detection. A voltage to generate force in a direction reverse to a detection signal of acceleration by the capacitive elements for the signal detection is applied to the capacitive elements for the servo control. Further, the acceleration sensor includes a variable capacity unit compensating for a mismatch of capacity values of the capacitive elements for the servo control at an ASIC side, detects a leak signal due to the mismatch of the capacity values in an ASIC, controls a capacity value of the variable capacity unit, on the basis of a detection result, compensates for an influence of the mismatch of the capacity values, and executes a normal signal detection/servo control simultaneous operation.