The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Jan. 17, 2018
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); G01N 30/66 (2006.01); G01N 25/48 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 30/66 (2013.01); B81C 1/00103 (2013.01); B81C 1/00246 (2013.01); B81C 1/00611 (2013.01); G01N 25/482 (2013.01); G01N 33/0031 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0384 (2013.01); B81B 2203/0392 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0133 (2013.01);
Abstract
Method of fabricating a microelectromechanical structure et comprising two elements suspended from a support, a cavity made in the support, said cavity having two different depths, including: