The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2020

Filed:

Nov. 06, 2017
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Masakatsu Ohno, Utsunomiya, JP;

Yoshiharu Hirakata, Ebina, JP;

Shingo Eguchi, Atsugi, JP;

Yasuhiro Jinbo, Isehara, JP;

Hisao Ikeda, Zama, JP;

Kohei Yokoyama, Fujisawa, JP;

Hiroki Adachi, Tochigi, JP;

Satoru Idojiri, Tochigi, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 37/00 (2006.01); B32B 38/18 (2006.01); B32B 27/08 (2006.01); B32B 27/20 (2006.01); B32B 27/36 (2006.01); B32B 37/12 (2006.01); B32B 17/10 (2006.01); B32B 38/00 (2006.01);
U.S. Cl.
CPC ...
B32B 37/0046 (2013.01); B32B 17/10431 (2013.01); B32B 27/08 (2013.01); B32B 27/20 (2013.01); B32B 27/36 (2013.01); B32B 37/1284 (2013.01); B32B 38/18 (2013.01); B32B 38/1841 (2013.01); B32B 37/003 (2013.01); B32B 37/0015 (2013.01); B32B 38/0008 (2013.01); B32B 38/1858 (2013.01); B32B 2264/102 (2013.01); B32B 2264/105 (2013.01); B32B 2309/68 (2013.01); B32B 2457/14 (2013.01); B32B 2457/20 (2013.01); H01L 2224/01 (2013.01); Y10T 156/15 (2015.01); Y10T 156/1798 (2015.01);
Abstract

A yield in the step of bonding two members together is improved. A bonding apparatus includes a stage capable of supporting a first member having a sheet-like shape, a fixing mechanism capable of fixing one end portion of a second member having a sheet-like shape so that the second member overlaps with the first member, and a pressurizing mechanism capable of moving from a side of the one end portion of the second member to a side of the other end portion and spreading a bonding layer under pressure between the first member and the second member. The first member and the second member are bonded to each other.


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