The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2020
Filed:
Feb. 02, 2016
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Shinichi Hirano, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 64/386 (2017.01); G03F 7/00 (2006.01); B29C 64/20 (2017.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); B29C 64/393 (2017.01);
U.S. Cl.
CPC ...
B29C 64/386 (2017.08); B29C 64/20 (2017.08); G03F 7/00 (2013.01); G03F 7/0002 (2013.01); B29C 64/393 (2017.08); G03F 7/0037 (2013.01); G03F 9/00 (2013.01); G03F 2007/2067 (2013.01); G03F 2009/005 (2013.01);
Abstract
A lithography apparatus is provided. The lithography apparatus includes a control unit that obtains information of an expected processing count to be processed in a lot by a transfer unit, obtains information of an accumulated processing count, in the transfer unit, of each of originals in a original storage unit, and preferentially selects, from the originals, an original whose process enable count before the accumulated processing count reaches a predetermined count is not smaller than the expected processing count.