The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2020

Filed:

Apr. 04, 2017
Applicant:

Fuji Electric Co., Ltd., Kawasaki-shi, JP;

Inventors:

Shoji Yokoyama, Hachioji, JP;

Takeshi Matsushita, Matsumoto, JP;

Hiroaki Nakahara, Hino, JP;

Masaki Takeuchi, Saitama, JP;

Takenori Wada, Ageo, JP;

Masahiro Momose, Matsumoto, JP;

Masahiro Kikuchi, Matsumoto, JP;

Yoshio Igarashi, Azumino, JP;

Mitsuhiro Naruse, Inagi, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 1/00 (2006.01); H01L 21/67 (2006.01); B23K 1/002 (2006.01); B23K 3/08 (2006.01); B23K 1/008 (2006.01); B23K 3/047 (2006.01); H01L 23/00 (2006.01); B23K 101/40 (2006.01); H05K 3/34 (2006.01);
U.S. Cl.
CPC ...
B23K 1/002 (2013.01); B23K 1/008 (2013.01); B23K 3/0475 (2013.01); B23K 3/085 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/67144 (2013.01); H01L 21/67248 (2013.01); H01L 24/75 (2013.01); B23K 2101/40 (2018.08); H01L 2224/759 (2013.01); H01L 2224/7565 (2013.01); H01L 2224/75101 (2013.01); H01L 2224/75265 (2013.01); H01L 2224/75501 (2013.01); H05K 3/3494 (2013.01);
Abstract

A heating and cooling device including: an airtight processing chamber openable to load a member-to-be-processed in the airtight processing chamber; a transfer apparatus to adjust a distance between the member-to-be-processed and a cooling unit that cools the member-to-be-processed, by moving the member-to-be-processed and/or the cooling unit; an induction heating apparatus to heat the member-to-be-processed, including a induction heating coil; a cooling apparatus to cool the member-to-be-processed by cooling the cooling unit; a temperature sensor to determine a temperature of the member-to-be-processed; and a controller to control the induction heating apparatus and the cooling apparatus based on the temperature determined by the temperature sensor.


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