The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
May. 07, 2018
Applicant:
Zhongke Jingyuan Electron Limited, Beijing, CN;
Inventors:
Shiguang Li, Beijing, CN;
Jie Guo, Beijing, CN;
Assignee:
Zhongke Jingyuan Electron Limited, Beijing, CN;
Primary Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); H04N 5/225 (2006.01); G06T 7/521 (2017.01); H04N 5/232 (2006.01); H04N 5/372 (2011.01); H04N 5/374 (2011.01);
U.S. Cl.
CPC ...
H04N 5/2253 (2013.01); G06T 7/521 (2017.01); H04N 5/2256 (2013.01); H04N 5/23212 (2013.01); H04N 5/372 (2013.01); H04N 5/374 (2013.01);
Abstract
A method, an apparatus, and a non-transitory computer-readable medium for measuring a height of a sample includes: receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.