The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Mar. 02, 2017
Applicant:

Lg Display Co., Ltd., Seoul, KR;

Inventors:

Jae-Kwang Ryu, Goyang-si, KR;

Jong-Heon Kim, Yongin-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01L 21/683 (2006.01); C23C 14/04 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); C23C 14/12 (2006.01); C23C 14/50 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); C23C 14/042 (2013.01); C23C 14/12 (2013.01); C23C 14/50 (2013.01); H01L 21/682 (2013.01); H01L 21/6831 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01); H01L 51/001 (2013.01); H01L 51/0011 (2013.01);
Abstract

Disclosed is a deposition apparatus for an organic light-emitting diode, which is capable of preventing a large piece of glass from sagging due to gravity. The deposition apparatus allows the glass to be adhered to the lower surface of a planar electrostatic chuck from the center portion toward the edge portion thereof in the state in which it is upwardly convexly bent, thereby preventing deformation of a mask caused by the amount of sag of the glass. In addition, the deposition apparatus enables rapid alignment of the glass and the mask because the glass and the mask are adhered to each other via measurement of respective alignment marks provided thereon after the glass is located as close as possible to the mask without coming into contact with the mask.


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