The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Jul. 22, 2015
Applicant:
Physik Instrumente (Pi) Gmbh & Co. KG, Karlsruhe, DE;
Inventors:
Assignee:
PHYSIK INSTRUMENTE (PI) GMBH & CO. KG, Karlsruhe, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/053 (2006.01); H01L 41/09 (2006.01); H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0536 (2013.01); H01L 41/0475 (2013.01); H01L 41/053 (2013.01); H01L 41/0986 (2013.01);
Abstract
The invention relates to an actuator system comprising at least four electrically controllable, longitudinally adjustable actuators, to each of which a compressive force is applied in the direction of the longitudinal adjustment thereof by means of a separate housing that has an integrally formed resilient portion, each housing being designed as a single piece along with a base element shared by all housings. The invention further relates to an array comprising a plurality of actuator systems of said type.