The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Aug. 08, 2017
Applicants:

International Business Machines Corporation, Armonk, NY (US);

Solar Frontier K.k., Tokyo, JP;

Inventors:

Oki Gunawan, Fair Lawn, NJ (US);

Homare Hiroi, Tokyo, JP;

Jeehwan Kim, Cambridge, MA (US);

David B. Mitzi, Mahopac, NY (US);

Hiroki Sugimoto, Tokyo, JP;

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 31/0224 (2006.01); H01L 31/0216 (2014.01); H01L 31/0445 (2014.01);
U.S. Cl.
CPC ...
H01L 31/1896 (2013.01); H01L 31/02168 (2013.01); H01L 31/022441 (2013.01); H01L 31/022475 (2013.01); H01L 31/0445 (2014.12); H01L 31/1864 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11);
Abstract

A method for thermal exfoliation includes providing a target layer on a substrate to form a structure. A stressor layer is deposited on the target layer. The structure is placed in a temperature controlled environment to induce differential thermal expansion between the target layer and the substrate. The target layer is exfoliated from the substrate when a critical temperature is achieved such that the target layer is separated from the substrate to produce a standalone, thin film device.


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