The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Mar. 16, 2016
Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, CN;
Zhiwu Wang, Shenzhen, CN;
Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, Guangdong, CN;
Abstract
The present disclosure provides a thin film transistor and a method of preparing the same. The thin film transistor includes a substrate; a gate provided on the substrate; a gate insulating layer provided on the substrate and completely covering the gate; a semiconductor layer provided on the gate insulating layer; and an etch stop layer and a source/drain electrode layer provided on the semiconductor layer. The etch stop layer includes a first stop layer provided on a side of the channel region, the side being away from the gate, and a second stop layer provided on the first stop layer. The thin film transistor and the method for preparing the same as proposed in the present disclosure can prevent the device from being damaged by a high temperature and reduce the film-forming time and increase productivity; the SiOcan be prepared at a lower temperature.