The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Apr. 19, 2017
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Tohoku University, Sendai-shi, JP;
Masaya Okada, Itami, JP;
Fuminori Mitsuhashi, Itami, JP;
Yasunori Tateno, Yokohama, JP;
Masaki Ueno, Itami, JP;
Maki Suemitsu, Sendai, JP;
Hirokazu Fukidome, Sendai, JP;
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Tohoku University, Sendai-shi, JP;
Abstract
A stacked body includes: a substrate made of silicon carbide and having a first main surface forming an angle of 20° or less with a silicon plane; and a graphene film disposed on the first main surface and having an atomic arrangement oriented in relation to an atomic arrangement of silicon carbide forming the substrate. In an exposed surface of the graphene film which is a main surface opposite to the substrate, an area ratio of a region having a full width at half maximum of G' of 40 cmor less under Raman spectroscopy analysis is 50% or more. Accordingly, the stacked body is provided that enables a high mobility to be stably ensured in an electronic device manufactured to include the graphene film forming an electrically conductive portion.