The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Oct. 30, 2018
Applicant:

Electronics and Telecommunications Research Institute, Daejeon, KR;

Inventors:

Sun Jin Yun, Daejeon, KR;

Junjae Yang, Daejeon, KR;

Changbong Yeon, Namyangju-si, KR;

JungWook Lim, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 23/31 (2006.01); H01L 29/16 (2006.01); H01L 23/29 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 23/3171 (2013.01); H01L 21/02175 (2013.01); H01L 21/02282 (2013.01); H01L 21/02422 (2013.01); H01L 21/02527 (2013.01); H01L 21/02557 (2013.01); H01L 21/02568 (2013.01); H01L 21/02587 (2013.01); H01L 21/02628 (2013.01); H01L 23/29 (2013.01); H01L 23/291 (2013.01); H01L 29/1606 (2013.01); H01L 29/24 (2013.01); H01L 21/02601 (2013.01);
Abstract

Provided is method of manufacturing a conductive film. The method includes forming a conductive film including a plurality of flakes on a substrate, wherein the conductive film is a semiconductor or a conductor, and forming a passivation region selectively on a boundary between the flakes adjacent to each other. The passivation region includes a metal compound selected from the group consisting of metal chalcogenide and transition metal chalcogenide. The forming of the passivation region includes providing a solution containing a first precursor including a cation of the metal compound and a second precursor including an anion of the metal compound on the conductive film. pH of the solution is between 7.0 and 10.0.


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