The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Mar. 07, 2017
Applicant:

Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;

Inventors:

Takashi Minami, Kitakyushu, JP;

Yoshiki Kimura, Kitakyushu, JP;

Assignee:

KABUSHIKI KAISHA YASKAWA DENKI, Kitakyushu-Shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 9/00 (2006.01); B25J 18/02 (2006.01); B25J 9/04 (2006.01); B25J 11/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67706 (2013.01); B25J 9/0027 (2013.01); B25J 9/0087 (2013.01); B25J 9/043 (2013.01); B25J 11/0095 (2013.01); B25J 18/025 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01);
Abstract

A robot system includes a robot including a first hand, a second hand, an arm mechanism, and an elevator. The first hand is to hold a substrate. The second hand is to hold the substrate. The arm mechanism supports the first hand and the second hand to provide a height difference between the first hand and the second hand in a height direction of the robot. The elevator is to move the arm mechanism in the height direction within a moving range larger than the height difference. Both the first hand and the second hand put the substrate in the holder. Circuitry is configured to control the robot to move the arm mechanism in the height direction by the elevator to pass the substrate from the first hand to the second hand via the holder.


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