The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Jul. 09, 2015
Applicant:

Oxford University Innovation Limited, Oxford, GB;

Inventors:

Henry J. Snaith, Oxford, GB;

Giles E. Eperon, Oxford, GB;

James M. Ball, Oxford, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01G 9/20 (2006.01); C23C 14/24 (2006.01); C23C 14/12 (2006.01); C23C 14/06 (2006.01); C23C 14/58 (2006.01); C23C 14/00 (2006.01); H01L 51/00 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 51/42 (2006.01); H01L 31/0256 (2006.01);
U.S. Cl.
CPC ...
H01G 9/2009 (2013.01); C23C 14/0021 (2013.01); C23C 14/0694 (2013.01); C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/5846 (2013.01); C23C 14/5893 (2013.01); C23C 16/409 (2013.01); C23C 16/45553 (2013.01); C23C 16/45557 (2013.01); H01G 9/2027 (2013.01); H01L 51/0002 (2013.01); H01L 51/006 (2013.01); H01L 51/0032 (2013.01); H01L 51/0077 (2013.01); H01L 51/422 (2013.01); H01L 51/0056 (2013.01); H01L 51/4226 (2013.01); H01L 2031/0344 (2013.01); H01L 2251/306 (2013.01); Y02E 10/549 (2013.01); Y02P 70/521 (2015.11);
Abstract

The present invention provides a process for producing a layer of a crystalline material comprising a perovskite or a hexahalometallate, which process comprises: (i) exposing a substrate to a vapour comprising a first precursor compound in a first chamber to produce a layer of the first precursor compound on the substrate; and (ii) exposing the layer of the first precursor compound to a vapour comprising a second precursor compound in a second chamber to produce the layer of a crystalline material, wherein the pressure in the second chamber is above high vacuum. The invention also provides a process for producing a layer of a crystalline material comprising a perovskite or a hexahalometallate, which process comprises exposing a layer of a first precursor compound on a substrate to a vapour comprising a second precursor compound in a chamber to produce the layer of a crystalline material, wherein the pressure in the chamber is greater than high vacuum and less than atmospheric pressure. The invention also provides a process for producing a semiconductor device comprising a layer of a crystalline material, which process comprises producing said layer of a crystalline material by a process as according to the invention.


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