The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Jul. 28, 2017
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Hiroaki Kakuma, Kyoto, JP;

Kazuhiro Kitamura, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/73 (2017.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); B05B 12/12 (2006.01); B05B 13/04 (2006.01);
U.S. Cl.
CPC ...
G06T 7/74 (2017.01); B05B 12/124 (2013.01); B05B 13/0405 (2013.01); G06T 7/73 (2017.01); H01L 21/6708 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); H01L 21/67259 (2013.01); H01L 21/681 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30204 (2013.01);
Abstract

A displacement detecting apparatus according to the invention comprises: a mover which moves and positions a positioning object; an imager which images an image including an imaging object which is the positioning object or an object displacing integrally with the positioning object as the positioning object is displaced; and a displacement detector which detects the imaging object from the image imaged by the imager and detects a displacement of the positioning object based on the position of the imaging object detected in the image, wherein the displacement detector obtains a displacement amount of the positioning object with respect to a predetermined reference position from a value obtained by multiplying a distance between the position of the imaging object and the reference position in the image by a coefficient determined according to size of the imaging object in the image.


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