The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Feb. 21, 2018
Nikon Corporation, Tokyo, JP;
Chetan Mahadeswaraswamy, San Francisco, CA (US);
Johnathan Marquez, San Diego, CA (US);
Joseph P. Rossi, San Jose, CA (US);
NIKON CORPORATION, , JP;
Abstract
A stage assembly () that moves a device () includes a stage () that retains the device (), a base (), a stage mover assembly (), and a supply system (A). The supply system (A) is secured to and positioned on the stage (). The supply system (A) includes a circulation system () that circulates a circulation fluid () through a circulation conduit (D) in the stage () to control the temperature of the stage () and the device (). The circulation system () can include a storage container assembly (A) that defines a supply chamber () that supplies pressurized circulation fluid () to the circulation conduit (D), a return chamber () that receives the circulation fluid () that was circulated through the circulation conduit (D), a movable piston () that separates the supply chamber () from the return chamber (), and a piston urger () that urges the piston () to move to reduce the supply volume of the supply chamber () and urge the circulation fluid () out of the supply chamber ().