The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Apr. 09, 2015
Applicant:

Semikron Elektronik Gmbh & Co., KG, Nürnberg, DE;

Inventors:

Wolfgang-Michael Schulz, Zirndorf, DE;

Matthias Spang, Stein, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 5/02 (2006.01); H01L 23/00 (2006.01); C25D 7/00 (2006.01);
U.S. Cl.
CPC ...
C25D 7/12 (2013.01); C25D 5/02 (2013.01); C25D 17/001 (2013.01); H01L 24/27 (2013.01); H01L 24/94 (2013.01); C25D 7/008 (2013.01); H01L 2224/27462 (2013.01); H01L 2924/01029 (2013.01);
Abstract

Method and apparatus for the electrodeposition of a contact metal layer on contact areas of semiconductor components in a wafer assemblage. The method comprises: a) providing a wafer having components having at least one pn junction; b) arranging a non-conductive homogenizing device with respect to the first surfaces of the components, and an electrical contact device at a second surface of the wafer; c) introducing the wafer into an electroplating bath having an electrode, wherein the surface thereof consists at least partly of a first contact metal, and wherein the first surface of the components is in contact with the electroplating bath; d) applying a voltage to the electrode and to the contact device, as a result of which current flows between the electrode and the contact device, through the electroplating bath and the component and contact metal is thus deposited at the first contact areas of the components.


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