The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2020
Filed:
Mar. 08, 2019
Applicant:
Up Chemical Co., Ltd., Pyeongtaek-si, Gyeonggi-do, KR;
Inventors:
Won Seok Han, Pyeongtaek-si, KR;
Myeong-Ho Park, Suwon-si, KR;
Dae-Young Kim, Pyeongtaek-si, KR;
Jun Hwan Choi, Goyang-si, KR;
Assignee:
UP CHEMICAL CO., LTD., Pyeongtaek-si, Gyeonggi-Do, KR;
Primary Examiner:
Int. Cl.
CPC ...
C07F 9/00 (2006.01); C23C 16/18 (2006.01); H01L 21/285 (2006.01); C23C 16/34 (2006.01); C07F 17/00 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
C07F 9/00 (2013.01); C07F 17/00 (2013.01); C23C 16/18 (2013.01); C23C 16/34 (2013.01); C23C 16/40 (2013.01); C23C 16/405 (2013.01); C23C 16/455 (2013.01); C23C 16/45553 (2013.01); H01L 21/02 (2013.01); H01L 21/28 (2013.01); H01L 21/285 (2013.01);
Abstract
The present disclosure relates to a novel Group 5 metal compound, a method for preparing the Group 5 metal compound, a precursor composition for depositing a Group 5 metal-containing layer containing the Group 5 metal compound, and a method for depositing a Group 5 metal-containing layer using the precursor composition for depositing a Group 5 metal-containing layer.