The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 03, 2020

Filed:

Jun. 19, 2017
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Francesco Foncellino, Caserta, IT;

Flavio Francesco Villa, Milan, IT;

Andrea Di Matteo, Naples, IT;

Assignee:

STMICROELECTRONICS S.R.L., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/29 (2013.01); B06B 1/06 (2006.01); B06B 1/02 (2006.01); H01L 41/113 (2006.01); H01L 41/293 (2013.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
B06B 1/0622 (2013.01); B06B 1/0207 (2013.01); H01L 41/1138 (2013.01); H01L 41/293 (2013.01); H01L 41/332 (2013.01);
Abstract

A piezoelectric micro-machined ultrasonic transducer (PMUT) comprising: a semiconductor body having a first cavity and a membrane, which is suspended over the first cavity and faces a front side of the semiconductor body; and a piezoelectric transducer assembly extending at least in part on the membrane, which may be actuated for generating a deflection of the membrane. A second cavity extends buried in a peripheral region of the membrane and delimits a central region of the membrane. Moreover, the peripheral portion has a stiffness lower than the stiffness of the central portion.


Find Patent Forward Citations

Foncellino, Francesco. (2020). Piezoelectric micro-machined ultrasonic transducer (pmut) and method for manufacturing the pmut (U.S. Patent No. 10576500). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10576500

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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