The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Mar. 29, 2017
Skyworks Filter Solutions Japan Co., Ltd., Kadoma-Shi, JP;
Atsushi Takano, Osaka-Fu, JP;
Mitsuhiro Furukawa, Hyogo-Ken, JP;
Ichiro Kameyama, Osaka-Fu, JP;
Tetsuya Uebayashi, Osaka-Fu, JP;
SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD., Kadoma-Shi, JP;
Abstract
A method of fabricating an electronic component includes forming a functional unit on a main surface of a substrate, forming a sacrificial layer covering the functional unit on the main surface, forming a cap layer covering the sacrificial layer, the cap layer forming a periphery enclosing the cavity on the main surface, forming holes through the cap layer, forming a cavity by removing the sacrificial layer using a wet etching process through the holes, the holes including a peripheral hole communicating an inside of the cavity with an outside of the cavity along the main surface, and forming a first resin layer covering the cap layer and the main surface.