The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2020

Filed:

Mar. 27, 2017
Applicant:

Mitsui Chemicals Tohcello, Inc., Chiyoda-ku, Tokyo, JP;

Inventor:

Eiji Hayashishita, Nagoya, JP;

Assignee:

MITSUI CHEMICALS TOHCELLO, INC., Chiyoda-Ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B32B 43/00 (2006.01); H01L 21/78 (2006.01); H01L 21/66 (2006.01); G01R 31/26 (2014.01); C09J 7/29 (2018.01); C09J 5/00 (2006.01); B32B 27/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); B32B 27/00 (2013.01); B32B 43/006 (2013.01); C09J 5/00 (2013.01); C09J 7/29 (2018.01); G01R 31/2642 (2013.01); H01L 21/67 (2013.01); H01L 21/683 (2013.01); H01L 21/78 (2013.01); H01L 22/12 (2013.01); B32B 2457/00 (2013.01); C09J 2203/326 (2013.01); C09J 2205/302 (2013.01); C09J 2205/31 (2013.01); C09J 2423/00 (2013.01); C09J 2425/00 (2013.01); C09J 2433/00 (2013.01); C09J 2467/006 (2013.01); C09J 2475/00 (2013.01); C09J 2477/006 (2013.01); C09J 2479/086 (2013.01); C09J 2483/00 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68386 (2013.01);
Abstract

A method for manufacturing a semiconductor device according to the present invention includes at least the following four steps: (A) a step of preparing a structure () including an adhesive laminate film () having a heat-resistant resin layer (), a flexible resin layer () and an adhesive resin layer () in this order, and one or two or more semiconductor chips () adhered to the adhesive resin layer (); (B) a step of confirming an operation of the semiconductor chips () in a state of being adhered to the adhesive resin layer (); (C) a step of, after the step (B), peeling the heat-resistant resin layer () from the adhesive laminate film (); and (D) a step of, after the step (C), picking up the semiconductor chips () from the adhesive resin layer ().


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