The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2020

Filed:

May. 19, 2017
Applicant:

Airmems, Limoges, FR;

Inventors:

Romain Stefanini, Limoges, FR;

Ling Yan Zhang, Cognac-la-Foret, FR;

Abedel Halim Zahr, Limoges, FR;

Assignee:

AIRMEMS, , FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 59/00 (2006.01);
U.S. Cl.
CPC ...
H01H 59/0009 (2013.01); B81B 2201/01 (2013.01); B81B 2203/01 (2013.01); H01H 2059/0027 (2013.01); H01H 2239/004 (2013.01); H01H 2239/018 (2013.01);
Abstract

A micro-electromechanical-system (MEMS) switch () is formed in a substrate () and includes a first RF signal line () and a second RF signal line (), a deformable membrane (), an activator () configured to deform the membrane (), a substrate track, and a membrane track. The RF signal lines () are connected by one of the membrane track and the substrate track. A membrane RF ground () is integrated into the membrane (), and the membrane RF ground is electrically connected to a substrate RF ground (), the membrane RF ground framing and being formed parallel to at least one among the membrane track () and the substrate track, such that the RF ground () closely follows the RF signal path, in order to guide the propagation of the RF signal of the first RF signal line () to the second RF signal line () when the switch is in the on state.


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