The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Jul. 29, 2016
Applicant:
Konica Minolta Inc., Chiyoda-ku, JP;
Inventor:
Mitsuru Yokoyama, Takatsuki, JP;
Assignee:
Konica Minolta, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2013.01); G21K 1/02 (2006.01); B81C 1/00 (2006.01); B06B 1/06 (2006.01);
U.S. Cl.
CPC ...
G21K 1/025 (2013.01); B06B 1/0662 (2013.01); B81C 1/00571 (2013.01); Y10T 29/42 (2015.01);
Abstract
A method of manufacturing a high aspect ratio structure includes: a hole forming step of forming a plurality of holes in at least one principal surface of a substrate; a resist forming step of forming a first area with a resist layer and a second area without the resist layer on the principal surface provided with the plurality of holes after the hole forming step ends; and a concave portion forming step of immersing the substrate into an etching solution to form a concave portion in the substrate corresponding to the second area.