The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2020

Filed:

Oct. 19, 2016
Applicant:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Inventor:

Kazumi Harasaki, Inuyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 1/12 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); G05D 1/02 (2020.01);
U.S. Cl.
CPC ...
G05D 1/0225 (2013.01); H01L 21/67276 (2013.01); H01L 21/67727 (2013.01); H01L 21/67742 (2013.01); H01L 21/67745 (2013.01); H01L 21/67769 (2013.01); G05D 2201/0213 (2013.01); G05D 2201/0216 (2013.01);
Abstract

A track in a transport system includes a standby section associated with a certain processing apparatus to allow a transport vehicle to wait. When determining a transport request to transport a FOUP to a load port of the certain processing apparatus exists, the controller allocates, to the transport vehicle, a first transport command to transport the FOUP to the standby section. When reaching the standby section, the transport vehicle waits while holding the FOUP. Subsequently, when determining that the FOUP is transportable to the load port of the certain processing apparatus, the controller allocates, to the transport vehicle, a second transport command to transport the FOUP to the load port of the certain processing apparatus.


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