The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Jul. 17, 2018
Industrial Technology Research Institute, Hsinchu, TW;
Ludovic Angot, Hsinchu, TW;
Yueh-Yi Lai, Hsinchu County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A surface topography optical measuring system including image capture modules, a control module and a computation module is provided. Each image capture module includes an electronically controlled focal length tunable lens, an optical assembly and an image sensor, wherein the image capture modules respectively capture images at different heights between a lowest and a highest surfaces of an object. The control module is coupled to the image capture modules to independently control the image capture modules. The computation module is coupled to the control module and the image sensor of each image capture module, wherein the computation module perform calibration of the surface topography optical measuring system and assesses in-focused pixels in the captured images to measure a height difference between a highest and a lowest surfaces of the object or between any surfaces of interest of the object. A surface topography optical measuring method is also provided.